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注意：本文書は，編集上の修正を伴い再承認された。
レチクルへの損傷について，リスクは，レチクル上の静電気の変化率またはレチクルの周囲の電界強度によって定義される。
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SEMI M1-0309 (technical revision)
SEMI E37 — Specification for High Speed SECS Message Services (HSMS) Generic Services
P01400 - SEMI P14 - 黒鉛炉原子吸光分光法によるポジティブフォトレジスト中の錫の測定 StdPbc-1220 注意：本文書は，編集上の修正を伴い再承認された。NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1: