E16500 - SEMI E165 - Guide for a Comprehensive Equipment Training System When Dedicated Training Equipment is not Available Revision:SEMI E165-0712 - Superseded the cylinder pressure will drop

the cylinder pressure will drop rather rapidly

SEMI E167 — Specification for Equipment Energy Saving Mode Communication (EESM)

1-1107 (technical revision)

and behavior a Vacuum Pressure Gauge (VPG) device must support to be interoperable on the Sensor/Actuator Network

本ドキュメントはパイプラインを通して授受される窒素およびアルゴンガスにのみ適用される。シリンダ充填ガスまたは液体状のガスには適用されない。

E16500 - SEMI E165 - Guide for a Comprehensive Equipment Training System When Dedicated Training Equipment is not Available Revision:SEMI E165-0712 - Superseded the cylinder pressure will dropNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. NOTICE: Paragraphs entitled NOTE: are not an official part of this Standard or Safety Guideline and are not intended to modify or supersede the official Standard or Safety Guideline. These have been supplied by the global