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any special handling required for IPSs and MPCTs is defined
referenced standards and documents
This Standard also provides a guide for grade of 4
the following tool types:
no materials requirements or microcontamination limits are given
E16200 - SEMI E162 - Mechanical Interface Specification for 450 mm Front-Opening Shipping Box Load Port Revision:SEMI E162-1111 - Superseded any special handling required forNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. The purpose of this Document is to define the basic interface dimensions of a load port on the semiconductor manufacturing equipment, where a 450 front opening shipping box (FOSB) can be loaded and unloaded. The intention
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