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It provides the definition for interoperability with respect to SEMI SAN Standard-compliant Sensor/Actuator devices
calibrated by four-point probe sheet resistance measurements
This Standard includes the description of the physical connector
SEMI G16-88 (technical revision)
this Specification provides the information needed for practical operator interpretation
G08500 - SEMI G85 - Specification for Map Data Format StdPbc-0925 It provides the definition forNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Document describes in detail how the data items that relate to electronic mapping are to be represented in a file format. Although the examples given in this Document are for wafers, the map data format described can